| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for an opto-electric hybrid substrate in which an optical waveguide hybrid substrate can be manufactured through a simple step without complicating a manufacturing step, and provide a highly reliable opto-electric hybrid substrate and a highly reliable electronic apparatus that are manufactured by the manufacturing method for the optical waveguide hybrid substrate. <P>SOLUTION: A manufacturing method for an opto-electric hybrid substrate includes: a step of preparing a support substrate 81 including a pore 83 that allows light transmission and a sheet material 82 in a sheet form, and bonding the sheet material 82 to the support substrate 81 so as to cover the pore 83; a step of forming a liquid film by supplying a liquid material containing an optical waveguide formation material for forming an optical waveguide onto the support substrate 81 by a coating method in a state that the sheet material 82 is interposed therebetween; a step of forming a layer including the optical waveguide formation material by drying the liquid film; and a step of forming an optical waveguide 20 by performing predetermined processing on the layer. <P>COPYRIGHT: (C)2013,JPO&INPIT |
