THE STRUCTURE OF CANTILEVER AND MANUFACTURING OF THE SAME

摘要

PURPOSE: A cantilever structure and a manufacturing method thereof are provided to increase vertical resolution of an atomic force microscope which is influenced by a spring constant and make a probe sharper, thereby increasing horizontal resolution of the atomic force microscope. CONSTITUTION: A cantilever support unit(114) is arranged on one side of a body unit and is made of polymer-based materials. A cantilever(112) is extended from the cantilever support unit. The cantilever protrudes from a flat area of the body unit. An end of a probe(116) sharply protrudes from one side of the cantilever. Piezoresistive sensors(122, 224) are formed on at least one side of the cantilever.