| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a preprocessing apparatus for gas analyzer in which moisture, hydrofluoric acid and powder contained in a waste gas exhausted from a waste gas processing device can be removed efficiently, and a frequency of maintenance of the preprocessing apparatus for gas analyzer can be reduced. <P>SOLUTION: A preprocessing apparatus comprises: a moisture removal unit 15 which is connected with a waste gas processing device 11 and removes moisture contained in a waste gas exhausted from the waste gas processing device 11; a hydrofluoric acid removal unit 16 which is connected with the moisture removal unit 15 and removes hydrofluoric acid contained in the waste gas from which the moisture has been removed; and a power removal unit 17 which is connected with the hydrofluoric acid removal unit 16 and an analyzer 12, removes the powder contained in the waste gas from which the moisture and the hydrofluoric acid have been removed, and supplies the waste gas from which the powder has been removed to the analyzer 12. <P>COPYRIGHT: (C)2013,JPO&INPIT |
