发明名称 ELECTRON BEAM SOURCE DEVICE AND ELECTRON BEAM EXCITATION TYPE LIGHT SOURCE DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide an electron beam source device capable of uniformly and stably radiating electron beams, and an electron beam excitation type light source device capable of obtaining high light emission efficiency. <P>SOLUTION: An electron beam source device comprise a cathode electrode having a planar electron beam emission part constituted by a carbon nano-tube, and an electron extraction electrode provided away from and opposite to the electron beam emission part, and having an opening for permeating electron beams. An electron beam regulator for directing the electron beams emitted from the electron beam emission part to the opening for permeating the electron beams of the electron extraction electrode is arranged away from and opposite to the electron beam emission part, at a position between the cathode electrode and the electron extraction electrode. In an electron beam excitation type light source device, the electron beam source device, and a semiconductor light emitting element excited by the electron beams emitted from the electron beam source device are arranged inside a vacuum vessel. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012195144(A) 申请公布日期 2012.10.11
申请号 JP20110057886 申请日期 2011.03.16
申请人 USHIO INC 发明人 TAKADA HIROYUKI;MAESO TAKESHI;HANEDA HIROSHIGE;YAMAGUCHI MASANORI;KATAOKA KEN;TAKAGI RYOHEI
分类号 H01J1/304;H01L33/00 主分类号 H01J1/304
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