发明名称 |
METHOD FOR FORMING TCO FILMS AND THIN FILM STACK |
摘要 |
A method for controlling surface morphology of a transparent conductive oxide film (TCO) is provided. A substrate is provided as a basis for forming a solar cell. Onto the substrate, a seed layer is deposited. Then, the method includes depositing the transparent conductive oxide film (TCO) above the seed layer. The seed layer is adapted to control the surface morphology of the transparent conductive oxide film. The surface of the transparent conductive oxide film is etched in order to provide a front contact of the solar cell.
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申请公布号 |
US2012255602(A1) |
申请公布日期 |
2012.10.11 |
申请号 |
US201113081207 |
申请日期 |
2011.04.06 |
申请人 |
SCHMIDT URSULA INGEBORG;SOMMER ELISABETH;VERMEIR INGE;KRESS MARKUS;KUHR NIELS;OBERMEYER PHILIPP;SEVERIN DANIEL;SUPRITZ ANTON;APPLIED MATERIALS, INC. |
发明人 |
SCHMIDT URSULA INGEBORG;SOMMER ELISABETH;VERMEIR INGE;KRESS MARKUS;KUHR NIELS;OBERMEYER PHILIPP;SEVERIN DANIEL;SUPRITZ ANTON |
分类号 |
H01L31/0224;B82Y99/00;H01L31/18 |
主分类号 |
H01L31/0224 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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