| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the processing quality of the edge deletion of a thin-film solar battery panel. <P>SOLUTION: Displacement meters 201a, 201b which measure the displacement of the processing surface of the thin-film solar battery panel in the z-axis direction are arranged at the lower surface 133A of a processing head 133 so that measuring positions PSa, PSb are separated from the irradiation center PL of laser light at a threshold distance DT1 or longer, and at least one measuring position separated from the irradiation center PL at a threshold distance DT2 or longer exists in all four directions of positive and negative directions of an x-axis and positive and negative directions of a y-axis. When performing the edge deletion of the thin-film solar battery, the displacement meter 201 which performs measurement in the measuring position separated at the maximum assumption distance DS or longer from a side to be processed to the inside of a panel is selected, and a focus position of the laser light is controlled on the basis of the measurement result by the selected displacement meter 201. This invention can be applied to, for example, a laser processing device which performs the edge deletion of the thin-film solar battery. <P>COPYRIGHT: (C)2013,JPO&INPIT |
