| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide at least almost uniform radiation angles of laser light emitted from each of surface light-emitting lasers of a surface light-emitting laser array. <P>SOLUTION: In a surface light-emitting laser array (VCSEL laser array), a plurality of laser elements (surface light-emitting laser :VCSEL) are arrayed in each of which, a first reflecting mirror 98, an active layer 97, and a second reflecting mirror 93 are sequentially stacked on a semiconductor substrate 99, with a second electrode 92 electrically connected to the second reflecting mirror 93 containing an opening 94 for taking out laser light, and a current constriction layer 95 is contained inside, or at a portion to be adjoined with, the first reflecting mirror 98 or the second reflecting mirror 93, forming a mesa post shape. Especially the shape of the oxidizing constriction layer 95 of the laser element positioned closer to a central part is larger in size than the laser element positioned closer to the outside. The opening 94 formed at the second electrode 92 of the laser element is formed in a size such that the radiation angle of laser light emitted from the laser element according to the size of the oxidizing constriction layer 95 comes to be constant. <P>COPYRIGHT: (C)2013,JPO&INPIT |
