发明名称 GRINDING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for grinding a workpiece free from generation of cracks even when the workpiece is ground into a thin shape. <P>SOLUTION: The grinding method for grinding the workpiece by a grinding wheel having a grinding stone, applies a pressure on the workpiece at least on an entrance side of the workpiece relative to the grinding stone, below an end surface of which the workpiece enters during grinding, thereby grinding the workpiece while the workpiece located on the entrance side relative to the grinding stone, is flattened relative to the workpiece located below the end surface. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012192491(A) 申请公布日期 2012.10.11
申请号 JP20110058210 申请日期 2011.03.16
申请人 DISCO CORP 发明人 DAII AKIJI
分类号 B24B49/08;B24B7/00;B24B41/06;H01L21/304 主分类号 B24B49/08
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