| 摘要 |
<P>PROBLEM TO BE SOLVED: To transfer a substrate while maintaining flatness of the substrate surface regardless of the substrate area or the thickness of substrate. <P>SOLUTION: A substrate holding means 7 includes a suction member 7a which suction holds the lower surface of a substrate G at both ends in the width direction, and a pulling means 7e, 7f, 7g for pulling the suction member to the outside of the substrate in the width direction. The substrate floating above a floatation stage 2 is transferred by a substrate transfer means 6 in a state where the lower surface is suction held at both ends in the width direction by the suction member, and both ends in the width direction are pulled to the outside in the width direction by the pulling means. <P>COPYRIGHT: (C)2013,JPO&INPIT |
