发明名称 ROLL-LIKE MOLD FOR IMPRINT AND METHOD OF MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a roll-like mold, along with its manufacturing method, in which a fine rough is formed on the surface with no seam, with mechanical strength being excellent. <P>SOLUTION: A roll-like mold for continuous imprinting has a rough that is formed by utilizing a regular fine hole array of anode oxidation porous alumina formed on the surface with no seam. In order to manufacture it, a roll-like mold that has a hole array structure or pillar array structure on the surface is used. In order to manufacture it, a pipe or round rod of aluminum material in which anode oxidation porous alumina layer is formed is used as a mold, to pack fine holes of the anode oxidation porous alumina layer with a material. By melting and removing the mold, a roll-like mold is manufactured in which a fine hole array is transferred. The resultant roll-like mold can be used as an imprint mold for continuously transferring a fine pattern on the surface of a substrate such as polymer with no seam. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012195600(A) 申请公布日期 2012.10.11
申请号 JP20120110771 申请日期 2012.05.14
申请人 KANAGAWA ACAD OF SCI & TECHNOL 发明人 MASUDA HIDEKI;YAGISHITA TAKASHI;NISHIO KAZUYUKI;KUMAGAI NAOKO
分类号 H01L21/027;B29C33/42;B29C59/04;C25D11/14;C25D11/24 主分类号 H01L21/027
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