APPARATUS AND METHOD FOR CRYSTAL GROWTH

摘要

An apparatus for vapour phase crystal growth is described comprising an envelope assembly having at least one source module defining at least one source volume, at least one growth module defining at least one growth volume, and at least one manifold module defining at least one manifold volume, wherein one or more source modules, a manifold module and a growth module are configured co-operably to define a fluidly continuous envelope volume including a flow restrictor between each source volume and the growth volume; a vacuum vessel containing one or more such envelope assemblies; an evacuator to evacuate the vacuum vessel; a fluid communication path between the envelope volume and the vacuum vessel associated with each source volume at a location on the source volume side of its associated flow restrictor that is configurable to be open during evacuation; and a closure mechanism configured to selectively restrict, and preferably substantially close, the fluid communication path between each source volume and the vacuum vessel after evacuation. A method of employing such an apparatus for vapour phase crystal growth, including a method of preparing such an apparatus for vapour phase crystal growth in an evacuation phase, are also described.