发明名称 |
Electromechanical transducer and method of producing the same |
摘要 |
An electromechanical transducer includes a first electrode (13); a silicon oxide film disposed on the first electrode (13); and a vibration film including a silicon nitride film disposed on the silicon oxide film with a space therebetween and a second electrode (4) disposed on the silicon nitride film so as to oppose the first electrode (13). |
申请公布号 |
EP2509125(A2) |
申请公布日期 |
2012.10.10 |
申请号 |
EP20120159811 |
申请日期 |
2012.03.16 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
TORASHIMA, KAZUTOSHI;AKIYAMA, TAKAHIRO;TOMIYOSHI, TOSHIO |
分类号 |
H01L41/09;H01L41/08;H01L41/316;H01L41/332 |
主分类号 |
H01L41/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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