发明名称 Electromechanical transducer and method of producing the same
摘要 An electromechanical transducer includes a first electrode (13); a silicon oxide film disposed on the first electrode (13); and a vibration film including a silicon nitride film disposed on the silicon oxide film with a space therebetween and a second electrode (4) disposed on the silicon nitride film so as to oppose the first electrode (13).
申请公布号 EP2509125(A2) 申请公布日期 2012.10.10
申请号 EP20120159811 申请日期 2012.03.16
申请人 CANON KABUSHIKI KAISHA 发明人 TORASHIMA, KAZUTOSHI;AKIYAMA, TAKAHIRO;TOMIYOSHI, TOSHIO
分类号 H01L41/09;H01L41/08;H01L41/316;H01L41/332 主分类号 H01L41/09
代理机构 代理人
主权项
地址