| 摘要 |
PURPOSE: An excimer lamp apparatus can control the measured value change of the ultraviolet ray by the convection of atmosphere by emitting so that the flow of the inactive gas spreads out from the opening of the cylindrical form part to the excimer lamp to the aperture circumference. CONSTITUTION: An optical sensor(3) comprises the light monitor part, and the cylindrical form part and frame part. The light monitor part comprises the photo diode and fluorescent substance. A cylindrical form part(31) comprises the light monitor part and the opening opened to the excimer lamp. The frame part(32) interlinks the light monitor part and cylindrical form part. |
