发明名称 |
ELECTROMECHANICAL SYSTEMS, WAVEGUIDES AND METHODS OF PRODUCTION USING DENSITY CHANGING SACRIFICIAL LAYERS |
摘要 |
<p>A method of producing an electromechanical device includes forming a layer of density-changing material on a substructure, and forming a support layer on at least a portion of the layer of density-changing material. The density-changing material has a first density during the forming the layer and a second density subsequent to the forming the support layer, the second density being greater than the first density such that the layer of density-changing material shrinks in at least one dimension to provide a gap between the layer of density changing material and at least one of the support layer and the substructure. A combined electronic and electromechanical device has a substrate, an electronic circuit formed on the substrate, and an electromechanical system formed on the substrate to provide a combined electronic and electromechanical device on a common substrate. The electromechanical system comprises a structure that is free to move within a gap defined by the electromechanical system.</p> |
申请公布号 |
EP2507160(A2) |
申请公布日期 |
2012.10.10 |
申请号 |
EP20100821457 |
申请日期 |
2010.12.06 |
申请人 |
SCANNANOTEK OY |
发明人 |
PAVLOV, ANDREI, JURIEVICH;PAVLOVA, YELENA, VASILJEVNA |
分类号 |
B81C1/00 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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