| 摘要 |
PURPOSE: A 3-shaft acceleration sensor is provided to maximize performance while minimizing arrangement area by sharing an elastic body to an acceleration sensing part of x-shaft, y-shaft, and z-shaft directions. CONSTITUTION: An x-shaft acceleration sensing part(110) comprises x-shaft fixed electrodes and x-shaft moving electrodes. The x-shaft acceleration sensing part senses the acceleration of an x-shaft direction using location change of the x-shaft moving electrodes about the x-shaft fixed electrodes. A y-shaft acceleration sensing part(130) comprises y-shaft fixed electrodes and y-shaft moving electrodes. The y-shaft acceleration sensing part senses the acceleration of a y-shaft direction using location change of the y-shaft moving electrodes about the y-shaft fixed electrodes. A z-shaft acceleration sensing part(150) z-shaft fixed electrodes and z-shaft moving electrodes. The z-shaft acceleration sensing part senses the acceleration of a z-shaft direction using location change of the z-shaft moving electrodes about the z-shaft fixed electrodes. [Reference numerals] (110) X-shaft acceleration sensing part; (120) X-shaft acceleration sensing part; (130) Y-shaft acceleration sensing part; (140) Y-shaft fixing plate; (150) Z-shaft acceleration sensing part; (160) Z-shaft fixing plate; (170) Elastic body fixing plate; (180) Flow plate; (AA) Y-shaft; (BB) X-shaft; (CC) Z-shaft; (DD, EE) Elastic body(CSP) |
