发明名称 IMPROVED SOLUTION DEPOSITION ASSEMBLY
摘要 <p>Methods and devices are provided for improved deposition systems. In one embodiment of the present invention, a deposition system is provided for use with a solution and a substrate. The system comprises of a solution deposition apparatus; at least one heating chamber; at least one assembly for holding a solution over the substrate; and a substrate curling apparatus for curling at least one edge of the substrate to define a zone capable of containing a volume of the solution over the substrate. In another embodiment of the present invention, a deposition system for use with a substrate, the system comprising a solution deposition apparatus; at heating chamber; and at least assembly for holding solution over the substrate to allow for a depth of at least about 0.5 microns to 10 mm.</p>
申请公布号 EP2206141(A4) 申请公布日期 2012.10.10
申请号 EP20080859696 申请日期 2008.10.17
申请人 ROUSSILLON, YANN;UTTACHOO, PIYAPHANT;GREEN, GEOFF T.;SHELTON, ADDISON;SCHOLZ, JEREMY H. 发明人 ROUSSILLON, YANN;UTTACHOO, PIYAPHANT;GREEN, GEOFF T.;SHELTON, ADDISON;SCHOLZ, JEREMY H.
分类号 H01L21/208;C23C18/00;C25D17/00;H01L31/0392;H01L31/04 主分类号 H01L21/208
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