发明名称 INTERCHANGEABLE SAMPLE TRANSPORT AND FIXATION SYSTEM
摘要 PURPOSE: A replaceable sample transferring and fixing device is provided to prevent the position of a sample holder from being changed by flexibly fixing the sample holder to a guide roller unit. CONSTITUTION: A sample stage(200) supports a sample holder and moves in X and Y axes(520) to locate a sample in a measurement point. A guide roller unit guides and fixes the sample holder at a preset position. A stop block(400) is installed on the upper side of the sample stage to limit the horizontal movement of the sample holder within a preset distance. A position determining roller(500) is fixed by a recess part(120) formed on one side of the sample holder in a transverse direction.
申请公布号 KR101189719(B1) 申请公布日期 2012.10.10
申请号 KR20110044311 申请日期 2011.05.12
申请人 KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE 发明人 KIM, JU HWANG;MOON, DAE WON;LEE, TAE GEOL;YOON, SO HEE;MOON, JEONG HEE;LEE, HAE SUNG
分类号 H01L21/66 主分类号 H01L21/66
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