发明名称 THE HIGH PURITY AMMONIA CHARGING METHOD AND SYSTEM
摘要 PURPOSE: A charging method of high purity ammonia and an apparatus thereof are provided to enhance charging efficiency by selecting various pumps when charging ammonia. CONSTITUTION: A charging pipe(50) guides high purity ammonia. One end of the charging pipe is connected to a discharge pipe and the other end of the charging pipe is connected to the high purity ammonia storage tank. One end of a vapor ammonia water ring(60) is connected to a vent port(21a) of a suction chamber. The other end of the vapor ammonia water ring is connected to the top of a high purity ammonia storage tank(10). One end of a buffer pipe(70) is connected to the charging pipe. The other end of the buffer pipe is connected to the bottom of the high purity ammonia storage tank. [Reference numerals] (AA) Gaseous phase; (BB) Liquefied phase
申请公布号 KR20120111547(A) 申请公布日期 2012.10.10
申请号 KR20110030079 申请日期 2011.04.01
申请人 WONIK MATERIALS CO., LTD. 发明人 KIM, MOO HAN;KIM, JUN KYU;PARK, CHAE MO
分类号 H01L21/00 主分类号 H01L21/00
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