| 摘要 |
FIELD: engines and pumps. ^ SUBSTANCE: injector-type pump 2 makes an integral part of system 1 to create ultrahigh vacuum. Said pump comprises, at least, one chamber 11 to allow passage for high-rate fluid flow F. Chamber 11 first fluid inlet 3 terminating at nozzle opening 3a and fluid outlet 5. Pump chamber second inlet 4 is communicated with ultrahigh vacuum chamber 10 to be evacuated. Gas is sucked off from said chamber 10 via second inlet 4 by fluid flow jet that discharges gas from pump chamber 11. ^ EFFECT: creation of high and ultrahigh vacuum. ^ 13 cl, 2 dwg |
