发明名称 |
A SOLAR BATTERY BOARD INLINE MOVEMENT DEVICE |
摘要 |
<p>PURPOSE: A substrate in-line transfer apparatus for a solar cell is provided to increase a processing yield by consecutively transferring a carrier from a cleaning process part to a texturing process part with an in-line system. CONSTITUTION: A body frame(10) is placed between apparatus performing a cleaning process and a texturing process. The body frame comprises a support block(20), a substrate transfer stand(30), an elevating cylinder(40), and a horizontal cylinder. The support block holds a substrate carrier(100). The substrate transfer stand transfers the substrate carrier. The elevating cylinder and the horizontal cylinder perpendicularly and horizontally transfer the substrate transfer stand.</p> |
申请公布号 |
KR20120111646(A) |
申请公布日期 |
2012.10.10 |
申请号 |
KR20110030260 |
申请日期 |
2011.04.01 |
申请人 |
EM-POWER CO., LTD. |
发明人 |
JUNG, HYUN TAEK;CHOI, HYUN CHUL;JUNG, IN SOON;LIM, JONG DAE;YOON, JONG KU;HAN, YUN HO;KIM, YEONG KYUN |
分类号 |
H01L21/677;B65G49/07;H01L31/042 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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