发明名称 PATTERNING APPARATUS AND PATTERNING METHOD FOR A SUBSTRATE HAVING LARGE AREA
摘要 <p>PURPOSE: A patterning apparatus for a large size base material and a patterning method are provided to shorten work time by changing a patterning process for the large size base material into an automated process. CONSTITUTION: A loading unit(100) loads a large size base material to be patterned. A patterning unit(200) patterns the large size base material. An unloading unit(300) sends back the large size base material out of the apparatus. A carrier unit(400) transfers the large size base material from the loading unit to the patterning unit. The carrier unit transfers the patterned large size base material from the patterning unit to the unloading unit. A control unit controls the loading unit, the patterning unit, the unloading unit, and the carrier unit.</p>
申请公布号 KR20120111712(A) 申请公布日期 2012.10.10
申请号 KR20110030374 申请日期 2011.04.01
申请人 SOULBRAIN ENG CO., LTD. 发明人 CHOI, JI HOON;HONG, YOON SEOK;CHO, IN HO;CHO, YOUNG HOON;KIM, TAE WAN;CHOL, SE KYU;LIM, SEOK KYUN;AHN, JAE IL;JEON, JIN SOO
分类号 H01L31/18;H01L31/04 主分类号 H01L31/18
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