| 摘要 |
Due to a restriction in resolution and the like, it was sometimes difficult to detect small flaws and holes. Accordingly, an aspect of an inspecting apparatus exemplifying the present invention includes a profile measuring part (21, 13, 205, 206) measuring a profile of an object surface (11) and an image detecting part (205, 206, 27) detecting a light intensity distribution of the object surface by illuminating the object surface from mutually different plurality of directions. |
