ECHTANT AND METHOD FOR MANUFACTURING DISPLAY DEVICE USING THE SAME

摘要

PURPOSE: An etchant solution is provided to provide excellent etching profile to a double layer of titanium/copper. CONSTITUTION: An etchant solution comprises 0.5-20 weight% of persulfated salt, 0.01-2 weight% of a fluorine compound, 1-10 weight% of inorganic acid, 0.5-5 weight% of a cyclic amine compound, 0.1-5 weight% of chlorine compound, 0.05-3 weight% of copper salt, 0.1-10 weight% of organic acid or organic acid salt, and water. The persulfated salt comprises at least one compound selected from potassium persulphate, sodium persulphate, and ammonium persulfate. The fluorine compound comprises at least one compound selected from ammonium fluoride, sodium fluoride, potassium fluoride, calcium bifluoride, sodium bifluoride, and potassium bifluoride.