发明名称 COATING METHODS AND APPARATUS
摘要 <p>A coating apparatus comprises a coating chamber for coating the articles. The at least one preheat chamber is coupled to the coating chamber. The at least one loading station has a proximal end connectable to at least one of the preheat chambers when in an installed position at a distal end of the preheat chamber. The loading station further includes a carrier for carrying the articles and a drive system. The drive system is positioned to move the carrier between: a loading/unloading position of the carrier in the loading station; a preheat position of the carrier in the preheat chamber to which the loading station is connected; and a deposition position of the carrier in the coating chamber. A gas source is connected to the preheat chamber.</p>
申请公布号 EP2506980(A2) 申请公布日期 2012.10.10
申请号 EP20100834025 申请日期 2010.11.30
申请人 UNITED TECHNOLOGIES CORPORATION 发明人 NEAL, JAMES, W.;LATOUR, ROBERT, F.;ZIMMERMAN, BENJAMIN, J.
分类号 B05B5/03;B05B13/00;B05D3/00;C23C14/02;C23C14/54;C23C14/56;H01L21/67 主分类号 B05B5/03
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