发明名称 SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING THE SAME AND ELECTRONIC DEVICE INCLUDING SEMICONDUCTOR DEVICE
摘要 <p>PURPOSE: A semiconductor device, a manufacturing method thereof and an electronic device including the semiconductor device are provided to increase the on/off ratio of a transistor by applying a patterned graphene layer as a unit layer. CONSTITUTION: A semiconductor element includes a plurality of unit layers(L1-L4) separated in the vertical direction. The semiconductor element is used as a channel layer. An insulating layer(IN1-IN3) is formed between the unit layers. The unit layer respectively includes a graphene layer. The patterned graphene layer has a nano mesh structure.</p>
申请公布号 KR20120110873(A) 申请公布日期 2012.10.10
申请号 KR20110029035 申请日期 2011.03.30
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, SUN KOOK;CHOI, WOONG;JIN, YONG WAN
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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