发明名称 |
Nanoimprint resist, nanoimprint mold and nanoimprint lithography |
摘要 |
A nanoimprint mold includes a flexible body and a molding layer formed on the flexible body. The molding layer includes a plurality of protrusions and recesses. The molding layer is a polymer material polymerized via a cross linking polymerization of a nanoimprint resist which includes a hyperbranched polyurethane oligomer (HP), a perfluoropolyether (PFPE), a methylmethacrylate (MMA), a diluent solvent and a photo initiator. |
申请公布号 |
US8282381(B1) |
申请公布日期 |
2012.10.09 |
申请号 |
US201213459346 |
申请日期 |
2012.04.30 |
申请人 |
ZHU ZHEN-DONG;LI QUN-QING;ZHANG LI-HUI;CHEN MO;TSINGHUA UNIVERSITY;HON HAI PRECISION INDUSTRY CO., LTD. |
发明人 |
ZHU ZHEN-DONG;LI QUN-QING;ZHANG LI-HUI;CHEN MO |
分类号 |
B29C33/38 |
主分类号 |
B29C33/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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