发明名称 |
Method of fabricating crack-resistant thermal bend actuator |
摘要 |
A method of fabricating a thermal bend actuator comprises the steps of: (a) depositing a first layer comprised of silicon nitride onto a sacrificial scaffold; (b) depositing a second layer comprised of silicon dioxide onto the first layer; (c) depositing an active beam layer onto the second layer; (d) etching the active beam layer, the first layer and the second layer to define the thermal bend actuator; and (e) releasing the thermal bend actuator by removing the sacrificial scaffold. |
申请公布号 |
US8281482(B2) |
申请公布日期 |
2012.10.09 |
申请号 |
US20090546683 |
申请日期 |
2009.08.25 |
申请人 |
MCAVOY GREGORY JOHN;LAWLOR VINCENT PATRICK;O'REILLY RONAN PADRAIG SEAN;ZAMTEC LIMITED |
发明人 |
MCAVOY GREGORY JOHN;LAWLOR VINCENT PATRICK;O'REILLY RONAN PADRAIG SEAN |
分类号 |
H05B3/60 |
主分类号 |
H05B3/60 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|