发明名称 |
ADAPTIVE PROCESSING CONSTRAINTS FOR MEMORY REPAIR |
摘要 |
An apparatus and method for processing a plurality of semiconductor parts in a laser-based system adjusts a default recipe to account for work to be performed on at least one part of the plurality of parts. The work to be performed on a part is analyzed using the default recipe and a part-specific recipe including a modified parameter of the default recipe. The default or part-specific recipe is selected based on a desired processing result, and the selected recipe replaces the default recipe to perform the work using the laser-based system. |
申请公布号 |
KR20120110115(A) |
申请公布日期 |
2012.10.09 |
申请号 |
KR20127018124 |
申请日期 |
2010.10.29 |
申请人 |
ELECTRO SCIENTIFIC INDUSTRIES, INC. |
发明人 |
WATSON DANIEL J.;COHEN MUIR R. |
分类号 |
H01L21/82;H01L21/00 |
主分类号 |
H01L21/82 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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