PATTERN FORMING METHOD AND PATTERN FORMING APPARATUS

摘要

PURPOSE: A pattern formation method and apparatus are provided to form a pattern of desire shape by accurately radiating light to a coating solution and hardening the coating solution. CONSTITUTION: A substrate support unit(3) maintains a substrate(W). A nozzle(523) comprises a discharging port which consecutively discharges a coating solutions including photo hardening type material. A light output unit(53) emits light to the coating solution which is discharged from the discharging port. A transport tool(2) transfers the nozzle in a predetermined scanning moving direction along the surface of the substrate. The transport tool is installed on a support frame(101). A frame is fixed to the support frame. A head unit is attached to the frame. [Reference numerals] (532) Light source unit; (6) Controller