发明名称 |
METHODS FOR PRODUCING SILICON TETRAFLUORIDE |
摘要 |
Methods for producing silicon tetrafluoride by acid digestion of fluoride salts of alkali metal or alkaline earth metal and aluminum, optionally, in the presence of a source of silicon; methods for producing silane that include acid digestion of by-products of silane production to produce silicon tetrafluoride. |
申请公布号 |
KR20120110110(A) |
申请公布日期 |
2012.10.09 |
申请号 |
KR20127017085 |
申请日期 |
2010.12.18 |
申请人 |
MEMC ELECTRONIC MATERIALS, INC. |
发明人 |
BHUSARAPU SATISH;GUPTA PUNEET |
分类号 |
C01B33/107;C01B33/04 |
主分类号 |
C01B33/107 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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