LASER CONTROLLING DEVICE AND PROCESSING METHOD OF THEREOF

摘要

PURPOSE: A laser control apparatus and a processing method are provided to improve laser output stabilization by regularly forming a laser oscillation repetition frequency. CONSTITUTION: A laser head(100) outputs laser beams. A beam expander(200) expands the laser beams outputted from the laser head. A variable attenuator(300) changes the laser output which is expanded in the beam expander. A diffraction optical element(400) increases the uniformity of the laser beams passing through the variable attenuator. A variable slit(500) adjusts the size of the laser beams having increased uniformity by the diffraction optical elements. A variable shutter portion includes a variable shutter(610) which is a path of the adjusted laser beams. A condenser lens(700) concentrates the laser beams at the rear side of the variable shutter portion. A first reflective mirror(800) reflects the laser beams coming out from the condenser lens to a substrate direction. A beam profiler(820) measures a beam profile in real time. A controller(900) turns a power source of the apparatus on and off.