TEMPLATE, SURFACE PROCESSING METHOD OF TEMPLATE, SURFACE PROCESSING APPARATUS OF TEMPLATE, AND PATTERN FORMATION METHOD

摘要

PURPOSE: A template, a method and apparatus for processing the surface of the template and a method for forming a pattern is provided to reduce the price of a device by omitting a short wavelength light source and lens. CONSTITUTION: An unevenness pattern(11) includes a concave part(11d) and a convex part(11p). A base member(20) includes a main surface(20a) having unevenness(21). The unevenness includes a base member concave part(21d) and a base member convex part(21p). A surface layer(25) coats the unevenness of the base member. The thickness of the surface layer is thinner than the unevenness.