发明名称 MOUNTING METHOD AND MOUNTING DEVICE
摘要 <p>A mounting method of mounting an element on a substrate, includes a first hydrophilization process of hydrophilizing a region on a surface of the substrate where the element is to be joined; a second hydrophilization process of hydrophilizing the surface of the element; a mounting process of mounting the element on a mounting part such that the hydrophilized surface of the element faces upwards; a coating process of coating a liquid on the hydrophilized surface of the element; and an arrangement process of arranging the substrate above the mounting part such that the region on the surface of the substrate where the element is to be joined faces downwards. The method further includes a contact process of bringing the substrate arranged above the mounting part close to the mounting part on which the element is mounted to bring the liquid into contact with the surface of the substrate.</p>
申请公布号 KR20120109586(A) 申请公布日期 2012.10.08
申请号 KR20127019775 申请日期 2010.12.24
申请人 TOKYO ELECTRON LIMITED 发明人 SUGIYAMA MASAHIKO;NAKAMURA MICHIKAZU;SHINOZAKI DAI;AKIYAMA NAOKI
分类号 H01L21/52 主分类号 H01L21/52
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