| 摘要 |
PURPOSE: An ultraviolet ray measuring device is provided to produce uniform exposure by rotating an ultraviolet ray lamp assembly or a substrate in the ultra-violet ray hardening. CONSTITUTION: An ultraviolet ray lamp assembly(401) is installed on a processing chamber(413). The ultraviolet ray lamp assembly comprises a transformer and a magnetron. The transformer pumps microwave energy within an ultraviolet ray bulb(405) and a reflector(407). An ultraviolet ray detector assembly(409) is installed under the ultraviolet ray lamp assembly. A chamber window(411) passes through UV radiation from the ultraviolet ray bulb to a substrate(417) under the processing chamber. The substrate is settled on a substrate support portion(415).
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