发明名称 |
A TRAY USING A SCRAPPED WAFER AND METHOD FOR MANUFACTURING THEREOF |
摘要 |
PURPOSE: A tray using a scrapped wafer and a manufacturing method thereof are provided to reduce manufacturing costs by recycling the scrapped wafer. CONSTITUTION: A scrapped semiconductor wafer(100) is prepared. A mask layer is formed in the front of a semiconductor wafer. A pocket is formed on the semiconductor wafer by an etching process using the mask layer. An impact buffer layer(130) is formed in the front of the semiconductor wafer.
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申请公布号 |
KR101187711(B1) |
申请公布日期 |
2012.10.08 |
申请号 |
KR20120019907 |
申请日期 |
2012.02.27 |
申请人 |
EPWORKS |
发明人 |
KIM, GU SUNG;KUM, BYUNG HUN;LIM, KI MIN |
分类号 |
H01L21/673 |
主分类号 |
H01L21/673 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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