发明名称 A TRAY USING A SCRAPPED WAFER AND METHOD FOR MANUFACTURING THEREOF
摘要 PURPOSE: A tray using a scrapped wafer and a manufacturing method thereof are provided to reduce manufacturing costs by recycling the scrapped wafer. CONSTITUTION: A scrapped semiconductor wafer(100) is prepared. A mask layer is formed in the front of a semiconductor wafer. A pocket is formed on the semiconductor wafer by an etching process using the mask layer. An impact buffer layer(130) is formed in the front of the semiconductor wafer.
申请公布号 KR101187711(B1) 申请公布日期 2012.10.08
申请号 KR20120019907 申请日期 2012.02.27
申请人 EPWORKS 发明人 KIM, GU SUNG;KUM, BYUNG HUN;LIM, KI MIN
分类号 H01L21/673 主分类号 H01L21/673
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