| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma light source having an inter-electrode insulator which prevents the formation of a gap at a contact portion with an electrode part, and also to provide a manufacturing method of the plasma light source. <P>SOLUTION: Coaxial electrodes 11 each comprise: a rod-like center electrode 12 extending along a single axial line; a tubular guiding electrode 14 surrounding the center electrode 12 with a predetermined gap interposed therebetween; and a ring-shaped insulator 16 positioned between the center electrode 12 and the guiding electrode 14 so as to insulate between them. The insulator 16 is pressed by a hot press 18, and is so formed as to bring the center electrode 12 and the guiding electrode 14 into close contact with each other. <P>COPYRIGHT: (C)2013,JPO&INPIT |
