| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thermal treatment device capable of restraining vibrations of a substrate immediately after flash light radiation. <P>SOLUTION: A tip end 72a of a L-sectioned coupling part 72 is welded and fastened to a peripheral edge of a disc-shaped susceptor 74. Meanwhile, a base end 72b of the coupling part 72 is welded and fastened to an annular base ring 71. The base ring 71, the coupling part 72 and the susceptor 74 are all formed of quartz. The peripheral edge of the susceptor 74 and the base ring 71 are fastened to the both ends of the L-sectioned coupling part 72, and therefore, stress rapidly applied to the susceptor 74 and a semiconductor wafer held by the susceptor 74 can be mitigated by flash light radiation, and vibrations of the semiconductor wafer and the susceptor 74 can be restrained immediately after the flash light radiation. <P>COPYRIGHT: (C)2013,JPO&INPIT |
