| 发明名称 |
BASE SURFACE PROCESSING METHOD AND MEMS DEVICE |
| 摘要 |
A base surface processing method includes forming a protective film on a base surface; thinning a part of a base by grinding a part of the base surface; and etching a ground surface ground by the thinning.
|
| 申请公布号 |
US2012251783(A1) |
申请公布日期 |
2012.10.04 |
| 申请号 |
US201213432680 |
申请日期 |
2012.03.28 |
| 申请人 |
SAKAMOTO TAKESHI;TAKEUCHI JUNICHI;SEIKO EPSON CORPORATION |
发明人 |
SAKAMOTO TAKESHI;TAKEUCHI JUNICHI |
| 分类号 |
B32B3/00;B23P17/00 |
主分类号 |
B32B3/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
