发明名称 ADHESIVE AGENT AND TEMPORARY ADHESION METHOD USING SAME
摘要 <p>Provided is an adhesive agent which has high adhesiveness, but decomposes in the presence of an acid to realize excellent peeling performance. The adhesive comprises a polymer having units represented by the following formulas (1) and (2) as repeating units (1) (2) (where R1 is an optionally substituted alkyl group, and the like and R2 is an optionally substituted aryl group, and the like). An acid generator is added to the polymer such that the polymer will decompose when exposed to active light rays.</p>
申请公布号 WO2012133142(A1) 申请公布日期 2012.10.04
申请号 WO2012JP57440 申请日期 2012.03.23
申请人 DAICEL CORPORATION;SHIBAMOTO AKIHIRO;FUNAKI YOSHINORI 发明人 SHIBAMOTO AKIHIRO;FUNAKI YOSHINORI
分类号 C09J159/04;C09J5/00;C09J7/00;C09J11/06;C09J129/10;H01L21/304 主分类号 C09J159/04
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