| 摘要 |
<P>PROBLEM TO BE SOLVED: To calculate the metal element concentration in sample gas on the basis of a detection signal from an analyzer. <P>SOLUTION: Standard sample gas in which fine particles generated from a solution obtained by dissolving a measurement target metal element and a metal element for index in known concentration are dispersed, and standard index gas are introduced to an analyzer 7 to measure the detection signal intensity of the measurement target metal element and the metal element for index. A filter 13 collects the metal element for index of index gas generated from a solution obtained by dissolving the metal element for index in known high concentration. The collected gas in which fine particles generated from a collected solution obtained by dissolving the collected metal element for index are dispersed in gas is introduced to the analyzer 7 to measure the detection signal intensity of the metal element for index. Measurement target metal element concentration in the sample gas is calculated from each known concentration, each detection signal intensity, the set capacity of the collected solution, an introduction set time of the index gas to the filter 13, the introduction time and introduction volume flow rate of the sample gas to the analyzer, and the integrated intensity of the detection signal of the measurement target metal element from the analyzer. <P>COPYRIGHT: (C)2013,JPO&INPIT |
