| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coating device and method capable of preventing the occurrence of unevenness formed on a coating film and shortening a tact time (time required for single-unit operation, particularly in automated machines). <P>SOLUTION: In a coating device 1, a coating liquid is discharged on a substrate 10 from a discharge unit 3a, and after coating, a coated substrate is carried to drying equipment 5 by a float carrying mechanism 6. The float carrying mechanism has a vibrational floating mechanism 42, and in a carrying process, a coating unevenness formed on the coating film made on the substrate is eliminated by a leveling effect caused by the vibration generated on the substrate in the vibrational floating mechanism. <P>COPYRIGHT: (C)2013,JPO&INPIT |
