| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a storage container of semiconductor wafers, a storage method of the semiconductor wafers, and a semiconductor wafer storage body which store/take out semiconductor wafers in/from the container without causing the damage to the semiconductor wafers and effectively avoid the damage of the stored semiconductor wafers when an impact is applied from the exterior during transportation or storage. <P>SOLUTION: A storage container of semiconductor wafers comprises: columns 12 formed so as to at least partially face each other through a region 11a where the semiconductor wafers 2 are placed; and wafer holding parts 13 provided at side surfaces of the columns 12 facing the region 11a where the semiconductor wafers 2 are placed. A capacity of an airtight chamber 16 of each wafer holding part 13, which is formed between the column 12 and the wafer holding part 13, is increased by depressurizing the surrounding area, and a holding surface of each wafer holding part 13 holds side surfaces of the placed semiconductor wafers 2. <P>COPYRIGHT: (C)2013,JPO&INPIT |
