| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a calibration method for shape measuring apparatus with which a shape measuring apparatus for measuring a shape according to an optical cross-sectional expression can be calibrated without frequently moving a target for calibration, the shape measuring apparatus and the target for calibration. <P>SOLUTION: In a cylindrical target 20 for calibration of which the bottom face shape and dimensions are known, at least three light-emitting element groups 21-23 corresponding to a plurality of feature points in a bottom face shape of the target 20 for calibration and including a plurality of light-emitting points disposed in parallel with the bottom face are provided side by side in such a manner that positions in a column height direction of the target 20 for calibration become different and the feature points and the light-emitting points corresponding to the feature points are positioned on the same straight line. On the basis of each of the light-emitting elements, a captured image of a line laser and the fact that a compound ratio in projective transformation is constant, positional coordinates of the feature points of the target 20 for calibration are identified and apparatus calibration is performed. <P>COPYRIGHT: (C)2013,JPO&INPIT |
