发明名称 |
Apparatus and Method for Batch Non-Contact Material Characterization |
摘要 |
An apparatus for performing non-contact material characterization includes a wafer carrier adapted to hold a plurality of substrates and a material characterization device, such as a device for performing photoluminescence spectroscopy. The apparatus is adapted to perform non-contact material characterization on at least a portion of the wafer carrier, including the substrates disposed thereon. |
申请公布号 |
US2012248336(A1) |
申请公布日期 |
2012.10.04 |
申请号 |
US201213495160 |
申请日期 |
2012.06.13 |
申请人 |
LEE DONG SEUNG;BELOUSOV MIKHAIL;ARMOUR ERIC A.;QUINN WILLIAM E.;VEECO INSTRUMENTS INC. |
发明人 |
LEE DONG SEUNG;BELOUSOV MIKHAIL;ARMOUR ERIC A.;QUINN WILLIAM E. |
分类号 |
G01J3/443;C23C16/52 |
主分类号 |
G01J3/443 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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