Oscillating device for inertial sensor, particularly micromechanical inertial sensor, has substrate suspension for suspending oscillating mass to substrate, and adjusting unit is arranged for adjusting nonlinearity of oscillation

摘要

The oscillating device (101) has a substrate suspension (107) for suspending an oscillating mass (103) to a substrate, and a spring unit (105) is provided for coupling the oscillating mass to the substrate suspension. An adjusting unit (109) is arranged for adjusting a nonlinearity of the oscillation of the oscillating mass of the spring unit, and for adjusting a spring constant of the spring unit. The adjusting unit is formed as a body, in particularly an elastic body, that is formed as a closed frame. The spring unit is comprised of a bending beam arranged on the adjustment unit.