ELECTRON MICROSCOPE DEVICE, MAGNETIC HEAD SLIDER USING SAME, AND MANUFACTURING METHOD THEREOF

摘要

Provided is an electron microscope device with which it is possible to discharge electrons at a low voltage, and which measures an object in an environment wherein vacuum is not required. The electron microscope device is configured to comprise: an electron discharge unit which emits an electron beam, and which is formed on a thin film as a member which faces the object; an electron beam direction control unit which guides the electron beam which is emitted from the electron discharge unit in a prescribed direction; and an electron detection unit which detects electrons emitted from the object with respect to the electron beam which is emitted from the electron discharge unit and guided by a magnetic field control unit. The electron microscope device measures the object with an electron degree of freedom gap of 60nm or less.