发明名称 SEMICONDUCTOR MEMORY DEVICE AND ITS MANUFACTURING METHOD
摘要 According to one embodiment, a semiconductor memory device includes a semiconductor substrate having a gate groove and first to third grooves, the first to third grooves being formed on a bottom surface of the gate groove and the third groove being formed between the first and second grooves, and a gate electrode having a first gate portion formed in the first groove, a second gate portion formed in the second groove, a third gate portion formed in the third groove, and a fourth gate portion formed in the gate groove. A cell transistor having the gate electrode has a first channel region formed in the semiconductor substrate between the first and third gate portions and a second channel region formed in the semiconductor substrate between the second and third gate portions.
申请公布号 US2012248527(A1) 申请公布日期 2012.10.04
申请号 US201113236534 申请日期 2011.09.19
申请人 KAJIYAMA TAKESHI;KABUSHIKI KAISHA TOSHIBA 发明人 KAJIYAMA TAKESHI
分类号 H01L29/78;H01L21/76 主分类号 H01L29/78
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