| 摘要 |
<p>The purpose of the present invention is to make it possible to reuse anti-drying solution which was used for supercritical drying. A supercritical drying device is provided with a rinse unit (110) for cleaning a work piece with rinse solution (20) as a pre-process for supercritical drying, a supercritical drying unit (120) for performing the supercritical drying for the work piece cleaned with said rinse solution (20), and a transport unit (130) for transporting the work piece between said rinse unit (110) and said supercritical drying unit (120), wherein said supercritical drying unit (120) has an anti-drying solution supplying unit (140) for supplying anti-drying solution (30) including the same component as said rinse solution (20) and an anti-drying solution transportation unit (170) for collecting the anti-drying solution (30) supplied from said anti-drying solution supplying unit (140) to said supercritical drying unit (120) and transporting the anti-drying solution (30) collected from said supercritical drying unit (120) to said rinse unit (110), wherein the anti-drying solution (30) collected from said supercritical drying unit (120) is reused at least as a part of said rinse solution (20).</p> |
