发明名称 Continuous heat treatment method of substrate for solar cell, involves operating transport rollers in groups such that each group of rollers has different substrate transport speeds and/or substrate transport velocity gradients
摘要 <p>The method involves transporting substrates (3) by a substrate transport system of continuous heat treatment plant (1). The substrates are rested on transport rollers (2) of the substrate transport system throughout the passage of the substrates in the heat treatment plant. The transport rollers are operated in groups (A-C), where each group of rollers has different substrate transport speeds and/or substrate transport velocity gradients. An independent claim is included for continuous heat treatment plant of substrate.</p>
申请公布号 DE102011001789(A1) 申请公布日期 2012.10.04
申请号 DE20111001789 申请日期 2011.04.04
申请人 ROTH & RAU AG 发明人 FRIGGE, STEFFEN, DR.;MEYER, MIRKO;STAUDE, MIRKO
分类号 H01L21/677;F27B9/24 主分类号 H01L21/677
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