| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a processing device which can split a large workpiece with excellent precision. <P>SOLUTION: The processing device includes first and second chuck tables, and first and second processing means. The first and second chuck tables are positioned at a combination position where the holding surfaces are continuous, and a separation position by a positioning means. A workpiece is mounted on the first and second chuck tables while positioning the first and second chuck tables at the combination position, and then split by a split means. A first workpiece is processed by the first processing means, and a second workpiece is processed by the second processing means. <P>COPYRIGHT: (C)2013,JPO&INPIT |
